4/20/2010	8:47:26 AM	Main Vac valve closed
4/20/2010	8:47:40 AM	Main Vac valve opened
4/20/2010	8:47:44 AM	Bypass valve opened
4/20/2010	8:47:44 AM	Bypass valve closed
4/20/2010	8:47:54 AM	Bypass valve opened
4/20/2010	8:47:59 AM	Bypass valve closed
4/20/2010	8:48:13 AM	Main Vac valve closed
4/20/2010	9:01:59 AM	Main Vac valve opened
4/20/2010	9:03:11 AM	Main Vac valve closed
4/20/2010	9:03:18 AM	Main Vac valve opened
4/20/2010	9:03:48 AM	Main Vac valve closed
4/20/2010	9:03:53 AM	Main Vac valve opened
4/20/2010	9:03:58 AM	Main Vac valve closed
4/20/2010	9:04:02 AM	Main Vac valve opened
4/20/2010	9:04:03 AM	Bypass valve opened
4/20/2010	9:04:04 AM	Bypass valve closed
4/20/2010	9:04:12 AM	Bypass valve opened
4/20/2010	9:04:20 AM	Bypass valve closed
4/20/2010	9:04:23 AM	Main Vac valve closed
4/20/2010	9:04:29 AM	Main Vac valve opened
4/20/2010	9:06:08 AM	Main Vac valve closed
4/20/2010	9:06:17 AM	Main Vac valve opened
4/20/2010	9:06:44 AM	Main Vac valve closed
4/20/2010	9:11:02 AM	Main Vac valve opened
4/20/2010	9:11:24 AM	Bypass valve opened
4/20/2010	9:14:29 AM	Bypass valve closed
4/20/2010	9:14:32 AM	Main Vac valve closed
4/20/2010	9:14:35 AM	Main Vac valve opened
4/20/2010	9:14:35 AM	Bypass valve opened
4/20/2010	9:28:33 AM	Bypass valve closed
4/20/2010	9:28:37 AM	Main Vac valve closed
4/20/2010	9:28:49 AM	Main Vac valve opened
4/20/2010	9:28:52 AM	Bypass valve opened
4/20/2010	9:33:04 AM	Bypass valve closed
4/20/2010	9:33:05 AM	Main Vac valve closed
4/20/2010	9:33:13 AM	Main Vac valve opened
4/20/2010	9:33:14 AM	Bypass valve opened
4/20/2010	9:39:34 AM	Bypass valve closed
4/20/2010	9:39:35 AM	Main Vac valve closed
4/20/2010	9:51:42 AM	Main Vac valve opened
4/20/2010	9:51:43 AM	Bypass valve opened
4/20/2010	9:52:28 AM	Bypass valve closed
4/20/2010	9:52:30 AM	Main Vac valve closed
4/20/2010	9:52:34 AM	Main Vac valve opened
4/20/2010	9:52:35 AM	Bypass valve opened
4/20/2010	10:19:37 AM	Bypass valve closed
4/20/2010	10:19:39 AM	Main Vac valve closed
4/20/2010	10:19:54 AM	Bypass valve opened
4/20/2010	10:19:56 AM	Main Vac valve opened
4/20/2010	10:29:10 AM	Tube furnace set to 32
4/20/2010	10:29:20 AM	Tube furnace set to 100
4/20/2010	10:29:25 AM	Tube furnace set to 0
4/20/2010	11:39:55 AM	Bypass valve closed
4/20/2010	11:39:58 AM	Main Vac valve closed
4/20/2010	11:40:15 AM	Main Vac valve opened
4/20/2010	11:40:15 AM	Bypass valve opened
4/20/2010	12:55:02 PM	Bypass valve closed
4/20/2010	12:55:03 PM	Main Vac valve closed
4/20/2010	12:57:04 PM	Main Vac valve opened
4/20/2010	12:57:05 PM	Bypass valve opened
4/20/2010	12:57:30 PM	Bypass valve closed
4/20/2010	12:57:31 PM	Main Vac valve closed
4/20/2010	12:57:40 PM	Main Vac valve opened
4/20/2010	12:57:40 PM	Bypass valve opened
4/20/2010	12:58:54 PM	Bypass valve closed
4/20/2010	12:58:55 PM	Main Vac valve closed
4/20/2010	12:59:03 PM	Main Vac valve opened
4/20/2010	12:59:04 PM	Bypass valve opened
4/20/2010	1:29:23 PM	Bypass valve closed
4/20/2010	1:29:23 PM	Main Vac valve closed
4/20/2010	1:37:41 PM	Bypass valve opened
4/20/2010	1:37:56 PM	Main Vac valve opened
4/20/2010	1:38:23 PM	Bypass valve closed
4/20/2010	1:38:25 PM	Main Vac valve closed
4/20/2010	1:38:35 PM	Main Vac valve opened
4/20/2010	1:38:36 PM	Bypass valve opened
4/20/2010	2:12:15 PM	Bypass valve closed
4/20/2010	2:12:16 PM	Main Vac valve closed
4/20/2010	2:12:27 PM	Bypass valve opened
4/20/2010	2:12:28 PM	Main Vac valve opened
4/20/2010	4:00:58 PM	Bypass valve closed
4/20/2010	4:00:58 PM	Main Vac valve closed
4/20/2010	4:05:07 PM	Helium valve opened
4/20/2010	4:05:08 PM	Helium valve closed
4/20/2010	4:05:37 PM	Helium MFC set to  500.000000
4/20/2010	4:05:43 PM	Helium valve opened
4/20/2010	4:06:36 PM	Helium valve closed
4/20/2010	4:07:54 PM	Bypass valve opened
4/20/2010	4:08:10 PM	Main Vac valve opened
4/20/2010	5:05:15 PM	Bypass valve closed
4/20/2010	5:05:16 PM	Main Vac valve closed
4/20/2010	5:06:14 PM	Main Vac valve opened
4/20/2010	5:06:14 PM	Bypass valve opened
4/20/2010	5:07:01 PM	Bypass valve closed
4/20/2010	5:07:01 PM	Main Vac valve closed
4/20/2010	5:08:00 PM	Bypass valve opened
4/20/2010	5:08:35 PM	Main Vac valve opened
4/20/2010	5:13:15 PM	Bypass valve closed
4/20/2010	5:13:15 PM	Main Vac valve closed
4/20/2010	5:13:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2010	5:13:33 PM	Recipe started at 5:13 PM
4/20/2010	5:13:33 PM	H2 valve closed
4/20/2010	5:13:33 PM	BCl3 valve closed
4/20/2010	5:13:33 PM	PH3 valve closed
4/20/2010	5:13:33 PM	SiCl4 pre valve closed
4/20/2010	5:13:33 PM	SiCl4 post valve closed
4/20/2010	5:13:33 PM	Main Vac valve closed
4/20/2010	5:13:33 PM	Bypass valve closed
4/20/2010	5:13:33 PM	Bubbler valve closed
4/20/2010	5:13:33 PM	Helium valve opened
4/20/2010	5:13:33 PM	Helium MFC set to  500.000000
4/20/2010	5:13:33 PM	H2 MFC set to  0.000000
4/20/2010	5:13:33 PM	BCl3 MFC set to  0.000000
4/20/2010	5:13:33 PM	SiCl4 MFC set to  0.000000
4/20/2010	5:13:33 PM	Bypass solenoid MFC set to  0.000000
4/20/2010	5:13:34 PM	Tube furnace set to 0
4/20/2010	5:14:53 PM	Helium valve closed
4/20/2010	5:14:53 PM	H2 valve closed
4/20/2010	5:14:53 PM	BCl3 valve closed
4/20/2010	5:14:53 PM	PH3 valve closed
4/20/2010	5:14:53 PM	SiCl4 pre valve closed
4/20/2010	5:14:53 PM	SiCl4 post valve closed
4/20/2010	5:14:53 PM	Main Vac valve closed
4/20/2010	5:14:53 PM	Bypass valve closed
4/20/2010	5:14:53 PM	Bubbler valve closed
4/20/2010	5:14:53 PM	Helium MFC set to  0.000000
4/20/2010	5:14:53 PM	H2 MFC set to  0.000000
4/20/2010	5:14:53 PM	BCl3 MFC set to  0.000000
4/20/2010	5:14:53 PM	SiCl4 MFC set to  0.000000
4/20/2010	5:14:53 PM	Bypass solenoid MFC set to  0.000000
4/20/2010	5:14:53 PM	Tube furnace set to 0
4/20/2010	5:14:54 PM	Run finished at 5:14 PM
4/20/2010	5:14:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2010	5:15:33 PM	SiCl4 post valve opened
4/20/2010	5:15:34 PM	SiCl4 post valve closed
4/20/2010	5:16:02 PM	SiCl4 pre valve opened
4/20/2010	5:16:02 PM	SiCl4 pre valve closed
4/20/2010	5:16:03 PM	SiCl4 pre valve opened
4/20/2010	5:16:03 PM	SiCl4 pre valve closed
4/20/2010	5:16:27 PM	SiCl4 post valve opened
4/20/2010	5:16:28 PM	SiCl4 post valve closed
4/20/2010	5:16:31 PM	SiCl4 post valve opened
4/20/2010	5:16:31 PM	SiCl4 post valve closed
4/20/2010	5:16:38 PM	SiCl4 post valve opened
4/20/2010	5:16:38 PM	SiCl4 post valve closed
4/20/2010	5:16:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2010	5:16:48 PM	Recipe started at 5:16 PM
4/20/2010	5:16:48 PM	Helium valve closed
4/20/2010	5:16:48 PM	H2 valve closed
4/20/2010	5:16:48 PM	BCl3 valve closed
4/20/2010	5:16:48 PM	PH3 valve closed
4/20/2010	5:16:48 PM	SiCl4 pre valve closed
4/20/2010	5:16:48 PM	SiCl4 post valve closed
4/20/2010	5:16:48 PM	Main Vac valve closed
4/20/2010	5:16:48 PM	Bubbler valve closed
4/20/2010	5:16:48 PM	Bypass valve opened
4/20/2010	5:16:48 PM	Helium MFC set to  0.000000
4/20/2010	5:16:48 PM	H2 MFC set to  0.000000
4/20/2010	5:16:48 PM	BCl3 MFC set to  0.000000
4/20/2010	5:16:48 PM	SiCl4 MFC set to  0.000000
4/20/2010	5:16:48 PM	Bypass solenoid MFC set to  0.000000
4/20/2010	5:16:48 PM	Tube furnace set to 0
4/20/2010	5:17:17 PM	Helium valve closed
4/20/2010	5:17:17 PM	H2 valve closed
4/20/2010	5:17:17 PM	BCl3 valve closed
4/20/2010	5:17:17 PM	PH3 valve closed
4/20/2010	5:17:17 PM	SiCl4 pre valve closed
4/20/2010	5:17:17 PM	SiCl4 post valve closed
4/20/2010	5:17:17 PM	Bubbler valve closed
4/20/2010	5:17:17 PM	Main Vac valve opened
4/20/2010	5:17:17 PM	Bypass valve opened
4/20/2010	5:17:17 PM	Helium MFC set to  0.000000
4/20/2010	5:17:17 PM	H2 MFC set to  0.000000
4/20/2010	5:17:17 PM	BCl3 MFC set to  0.000000
4/20/2010	5:17:17 PM	SiCl4 MFC set to  0.000000
4/20/2010	5:17:17 PM	Bypass solenoid MFC set to  0.000000
4/20/2010	5:17:17 PM	Tube furnace set to 0
4/20/2010	5:17:18 PM	Run finished at 5:17 PM
4/20/2010	5:17:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2010	5:17:55 PM	Helium MFC set to  500.000000
4/20/2010	5:18:08 PM	Helium MFC set to  0.000000
4/20/2010	5:21:16 PM	Bypass valve closed
4/20/2010	5:21:17 PM	Main Vac valve closed
4/20/2010	5:21:30 PM	Bypass valve opened
4/20/2010	5:21:30 PM	Main Vac valve opened
4/20/2010	5:25:06 PM	Bypass valve closed
4/20/2010	5:25:06 PM	Main Vac valve closed
4/20/2010	5:25:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2010	5:25:19 PM	Recipe started at 5:25 PM
4/20/2010	5:25:19 PM	H2 valve closed
4/20/2010	5:25:19 PM	BCl3 valve closed
4/20/2010	5:25:19 PM	PH3 valve closed
4/20/2010	5:25:19 PM	SiCl4 pre valve closed
4/20/2010	5:25:19 PM	SiCl4 post valve closed
4/20/2010	5:25:19 PM	Main Vac valve closed
4/20/2010	5:25:19 PM	Bypass valve closed
4/20/2010	5:25:19 PM	Bubbler valve closed
4/20/2010	5:25:19 PM	Helium valve opened
4/20/2010	5:25:19 PM	Helium MFC set to  500.000000
4/20/2010	5:25:19 PM	H2 MFC set to  0.000000
4/20/2010	5:25:19 PM	BCl3 MFC set to  0.000000
4/20/2010	5:25:19 PM	SiCl4 MFC set to  0.000000
4/20/2010	5:25:19 PM	Bypass solenoid MFC set to  0.000000
4/20/2010	5:25:19 PM	Tube furnace set to 0
4/20/2010	5:26:39 PM	Helium valve closed
4/20/2010	5:26:39 PM	H2 valve closed
4/20/2010	5:26:39 PM	BCl3 valve closed
4/20/2010	5:26:39 PM	PH3 valve closed
4/20/2010	5:26:39 PM	SiCl4 pre valve closed
4/20/2010	5:26:39 PM	SiCl4 post valve closed
4/20/2010	5:26:39 PM	Main Vac valve closed
4/20/2010	5:26:39 PM	Bypass valve closed
4/20/2010	5:26:39 PM	Bubbler valve closed
4/20/2010	5:26:39 PM	Helium MFC set to  0.000000
4/20/2010	5:26:39 PM	H2 MFC set to  0.000000
4/20/2010	5:26:39 PM	BCl3 MFC set to  0.000000
4/20/2010	5:26:39 PM	SiCl4 MFC set to  0.000000
4/20/2010	5:26:39 PM	Bypass solenoid MFC set to  0.000000
4/20/2010	5:26:39 PM	Tube furnace set to 0
4/20/2010	5:26:39 PM	Run finished at 5:26 PM
4/20/2010	5:26:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2010	5:26:47 PM	SiCl4 post valve opened
4/20/2010	5:26:47 PM	SiCl4 post valve closed
4/20/2010	5:26:50 PM	SiCl4 post valve opened
4/20/2010	5:26:51 PM	SiCl4 post valve closed
4/20/2010	5:27:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2010	5:27:45 PM	Recipe started at 5:27 PM
4/20/2010	5:27:45 PM	Helium valve closed
4/20/2010	5:27:45 PM	H2 valve closed
4/20/2010	5:27:45 PM	BCl3 valve closed
4/20/2010	5:27:45 PM	PH3 valve closed
4/20/2010	5:27:45 PM	SiCl4 pre valve closed
4/20/2010	5:27:45 PM	SiCl4 post valve closed
4/20/2010	5:27:45 PM	Main Vac valve closed
4/20/2010	5:27:45 PM	Bubbler valve closed
4/20/2010	5:27:45 PM	Bypass valve opened
4/20/2010	5:27:45 PM	Helium MFC set to  0.000000
4/20/2010	5:27:45 PM	H2 MFC set to  0.000000
4/20/2010	5:27:45 PM	BCl3 MFC set to  0.000000
4/20/2010	5:27:45 PM	SiCl4 MFC set to  0.000000
4/20/2010	5:27:45 PM	Bypass solenoid MFC set to  0.000000
4/20/2010	5:27:45 PM	Tube furnace set to 0
4/20/2010	5:28:17 PM	Helium valve closed
4/20/2010	5:28:17 PM	H2 valve closed
4/20/2010	5:28:17 PM	BCl3 valve closed
4/20/2010	5:28:17 PM	PH3 valve closed
4/20/2010	5:28:17 PM	SiCl4 pre valve closed
4/20/2010	5:28:17 PM	SiCl4 post valve closed
4/20/2010	5:28:17 PM	Bubbler valve closed
4/20/2010	5:28:17 PM	Main Vac valve opened
4/20/2010	5:28:17 PM	Bypass valve opened
4/20/2010	5:28:17 PM	Helium MFC set to  0.000000
4/20/2010	5:28:17 PM	H2 MFC set to  0.000000
4/20/2010	5:28:17 PM	BCl3 MFC set to  0.000000
4/20/2010	5:28:17 PM	SiCl4 MFC set to  0.000000
4/20/2010	5:28:17 PM	Bypass solenoid MFC set to  0.000000
4/20/2010	5:28:17 PM	Tube furnace set to 0
4/20/2010	5:28:17 PM	Run finished at 5:28 PM
4/20/2010	5:28:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2010	5:30:15 PM	Bypass valve closed
4/20/2010	5:30:16 PM	Main Vac valve closed
4/20/2010	5:30:27 PM	Bypass valve opened
4/20/2010	5:30:28 PM	Main Vac valve opened
4/20/2010	5:43:02 PM	Bypass valve closed
4/20/2010	5:43:37 PM	Bypass valve opened
4/20/2010	5:43:38 PM	Bypass valve closed
4/20/2010	5:43:49 PM	Bypass valve opened
4/20/2010	5:44:55 PM	Bypass valve closed
4/20/2010	5:44:56 PM	Bypass valve opened
4/20/2010	5:44:57 PM	Bypass valve closed
4/20/2010	5:44:57 PM	Bypass valve opened
4/20/2010	5:44:59 PM	Bypass valve closed
4/20/2010	5:49:10 PM	Bypass valve opened
4/20/2010	5:50:53 PM	Bypass valve closed
4/20/2010	5:50:54 PM	Bypass valve opened
4/20/2010	5:50:54 PM	Bypass valve closed
4/20/2010	5:50:55 PM	Bypass valve opened
4/20/2010	5:50:55 PM	Bypass valve closed
4/20/2010	5:50:56 PM	Bypass valve opened
4/20/2010	5:50:56 PM	Bypass valve closed
4/20/2010	5:52:12 PM	Bypass valve opened
4/20/2010	5:52:12 PM	Bypass valve closed
4/20/2010	5:52:13 PM	Bypass valve opened
4/20/2010	5:52:13 PM	Bypass valve closed
4/20/2010	5:52:14 PM	Bypass valve opened
4/20/2010	5:52:15 PM	Bypass valve closed
4/20/2010	5:52:15 PM	Bypass valve opened
4/20/2010	5:52:16 PM	Bypass valve closed
4/20/2010	5:52:16 PM	Bypass valve opened
4/20/2010	5:52:17 PM	Bypass valve closed
4/20/2010	5:54:31 PM	Bypass valve opened
4/20/2010	5:54:32 PM	Bypass valve closed
4/20/2010	5:54:34 PM	Main Vac valve closed
4/20/2010	5:54:40 PM	Main Vac valve opened
4/20/2010	5:55:17 PM	Bypass valve opened
4/20/2010	6:50:34 PM	Bypass valve closed
4/20/2010	6:50:35 PM	Main Vac valve closed
4/20/2010	6:50:47 PM	Bypass valve opened
4/20/2010	6:50:47 PM	Main Vac valve opened
